Integrated Nanostructured Systems

The image shows an microfluidic nozzle array fabricated using a 3-D UV lithography system. The nozzle has an inner orifice size of 100µm. It is scalable down to 1µm range.

Micro/nano-biomedical device fabrication; wireless power transfer using RF/microwave.

In recent years, the Yoon’s MnM lab has developed a dynamic mode ultraviolet (UV) lithography system for complex 3-D microstructures such as an array of microfludic nozzle, an antenna array, implantable stent, and cell culturing scaffold. Also, he is developing a wireless energy transfer system for biomedical applications such as wireless pressure sensors and temperature sensors.

Cleanroom equipment for semiconductor fabrication such as an UV mask aligner, a DC/RF sputtering system for thin film deposition, an e-beam/ thermal evaporator, a plasma enhanced chemical vapor deposition, an reactive ion etching system, and an electrospinning system.

"Polymer particle-based micromolding to fabricate novel microstructures," Biomedical Microdevices, J.-H. Park, S.-O. Choi, R. Kamath, Y.K. Yoon, M.G. Allen, and M.R. Prausnitz, vol. 9, no. 2, 2007, pp. 223-234, http://dx.doi.org/10.1007/s10544-006-9024-4

"Tapered Conical Polymer Microneedles Fabricated Using Integrated Lens Technique for Transdermal Drug Delivery," J.-H. Park, Y.K. Yoon, S.-O. Choi, M.G. Allen, and M.R. Prausnitz, IEEE Trans. Biomedical Engineering, vol. 54, no. 5, 2007, pp. 903-913

"Analysis and Characterization of a High Performance Ka-band Surface Micromachined Elevated Patch Antenna," B. Pan, Y.K. Yoon, J. Papapolymerou, M. Tentzeris, and M. Allen, IEEE Antenna and Wireless Propagation Letters (AWPL) vol. 5, no. 1, 2006, pp. 511 - 514

"A Magnetically Excited and Sensed MEMS-Based Resonant Compass," S. Choi, S.-H. Kim, Y.K. Yoon, and M.G. Allen, IEEE Trans. Magnetics, vol. 42, no. 10, 2006, pp. 3506-3508

"Multidirectional UV Lithography for Complex 3-D MEMS Structures," Y.K. Yoon, Jung-Hwan Park, and Mark G. Allen, IEEE Journal of MEMS, vol. 15, no. 5, pp. 1121-1130, 2006

"Optimization of Synthetic Jet Fluidic Structures in Printed Wiring Boards," Y. Wang, G. Yuan, Y.K. Yoon, M.G. Allen, and S.A. Bidstrup, Journal of Electronic Packaging, vol. 128, pp. 353-359, Dec. 2006

"Large Eddy Simulation (LES) for Synthetic Jet Management," Y. Wang, G. Yuan, Yong-Kyu Yoon, M.G. Allen, and S.A. Bidstrup, International Journal of Heat and Mass Transfer, vol. 49, no. 13-14, July 2006, pp. 2173-2179

"Low-loss Microelectrodes Fabricated Using Reverse-side Exposure for Tunable Ferroelectric Capacitor," Y.K. Yoon, J. S. Kenney, A.T. Hunt, and M.G. Allen, Journal of Micromechanics and Mircroengineering, vol. 16, 2006, pp. 225-234

"Polymer-Core Conductor Approaches for RF MEMS," Y.K. Yoon, J.W. Park, and M.G. Allen, IEEE Journal of Microelectromechanical Systems (MEMS), vol. 14, no. 5, 2005, pp. 886-894

"Embedded Conductor Technology for Micromachined RF Elements," Y.K. Yoon and Mark G. Allen, Journal of Micromechanics and Microengineering, vol. 15, no. 6, 2005, pp. 1317-1326

"Active Cooling Substrates for Thermal Management of Microelectronics," Y. Wang, G. Yuan, Y.K. Yoon, M.G. Allen, and S.A. Bidstrup, IEEE Trans. Components and Packaging Technologies, vol. 28, no. 3, 2005, pp. 477-483

"A Reduced Intermodulation Distortion Tunable Ferroelectric Capacitor-Architecture and Demonstration," Y.K. Yoon, D. Kim, M.G. Allen, J.S. Kenney, and A.T. Hunt, IEEE Trans. Microwave Theory and Techniques, vol. 51, no. 12, December 2003, pp. 2568-2576